项目 | 单位 Unit | 指标（Index） | |||
| 反应烧结碳化硅 RBSIC(SISIC) | 氮化硅结合碳化硅 NBSIC | 常压烧结碳化硅 SSIC | 重结晶烧结碳化硅 RSIC | ||
| 碳化硅（SIC） | W% | 98 | 80 | 99 | 99 |
| 游离硅（SI） | W% | 2 | 0 | 0 | 0 |
| 氮化硅（SI3N4） | W% | 0 | 20 | 0 | 0 |
| 最高使用温度 Maximum temperature | ℃ | 1380 | 1550 | 1600 | 1650 |
| 密度(Density) | g/cm³ | 3.02 | 2.8 | 3.1 | 2.7 |
| 气孔率(Porosity) | Vol% | 1 | 12 | 0 | 15 |
| 抗弯强度 20℃ | Mpa | 250 | 160 | 380 | 100 |
| Bending strength 1200℃ | Mpa | 280 | 180 | 400 | 120 |
| 弹性模量(Elastic Modulus) | Gpa | 330 | 220 | 420 | 280 |
| 热传导系数 1000℃ Heat transfer coefficient | W/m.k | 45 | 15 | 74 | 35 |
| 热膨胀系数 Thermal expansion coefficient | K-1×10-6 | 4.5 | 5 | 4.1 | 4.6 |
| 硬度(Hardness) | kg/mm² | 2600 | 2600 | 2800 | 2000 |
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